深圳大学学报理工版

基于一维周期性光子晶体模型,引入服从高斯分布的无序扰动,形成周期性无序扰动的薄膜模型,研究膜厚微扰对纳米光子器件性能的影响.通过分析周期数和两种材料厚度对光学特性的影响,提出在周期性光子晶体中,同一个周期内一种材料的厚度误差可用另一种材料的厚度来弥补,从而得到稳定的禁带中心位置和禁带宽度.理论和实验结果均验证了此补偿方案可以削减相关厚度偏差的累积,同时降低制备精度要求,减小实验值和理论值的偏差.

In order to study the effect of film thickness perturbation on the performance of nanophotonic devices, this paper designs a periodic disordered photonic crystal model by introducing disordered perturbations obeying Gaussian distribution. By analyzing the influence of the cycles number and the thickness of two materials on the optical properties, an optimization scheme for compensating the film thickness disturbance is proposed. The thickness error of one material in the same period is compensated by the thickness of the other material. This compensation provides a stable forbidden center position and a forbidden band width. Both theory and experiments have verified that this compensation scheme can reduce the accumulation of thickness deviation. Our method reduces both the requirements for preparation accuracy and the deviation of experimental and theoretical values.

引言
1 结构模型和计算方法
2 结果与讨论
3 膜厚补偿方案
4 结语

图1 结构能带示意图<br/>Fig.1 (Color online)The diagram of structure and energy band

图1 结构能带示意图
Fig.1 (Color online)The diagram of structure and energy band

图2 周期数对光子晶体透射性能的影响<br/>Fig.2 The transmission spectra of photonic crystal with different periods

图2 周期数对光子晶体透射性能的影响
Fig.2 The transmission spectra of photonic crystal with different periods

图3 两种薄膜膜厚误差不同时,禁带位置的变化<br/>Fig.3 (Color online)Variation of band gap position with different thickness errors of two kinds of film

图3 两种薄膜膜厚误差不同时,禁带位置的变化
Fig.3 (Color online)Variation of band gap position with different thickness errors of two kinds of film

图4 Si层膜厚误差对光子晶体透射性能影响的理论和实验对比<br/>Fig.4 The comparison of theoretical and experimental results of transmission performance of PC with different thickness errors of Si layer film

图4 Si层膜厚误差对光子晶体透射性能影响的理论和实验对比
Fig.4 The comparison of theoretical and experimental results of transmission performance of PC with different thickness errors of Si layer film

图5 SiO2层膜厚误差对光子晶体透射性能影响的理论和实验对比<br/>Fig.5 The comparison of theoretical and experimental results of transmission performance of PC with different thickness errors of SiO2 layer film

图5 SiO2层膜厚误差对光子晶体透射性能影响的理论和实验对比
Fig.5 The comparison of theoretical and experimental results of transmission performance of PC with different thickness errors of SiO2 layer film

图6 膜厚误差对禁带宽度的影响<br/>Fig.6 The effect of film thickness error on forbidden band width

图6 膜厚误差对禁带宽度的影响
Fig.6 The effect of film thickness error on forbidden band width

图7 膜厚补偿优化方案流程<br/>Fig.7 The optimization chart of film thickness compensation

图7 膜厚补偿优化方案流程
Fig.7 The optimization chart of film thickness compensation

图8 不同膜层厚度计算值下透射光谱叠加图<br/>Fig.8 (Color online)Overlay of transmission spectrum at different film thicknesses

图8 不同膜层厚度计算值下透射光谱叠加图
Fig.8 (Color online)Overlay of transmission spectrum at different film thicknesses

图9 补偿后理论与实验对比<br/>Fig.9 Comparison of theoretical and experimental transmittance spectra after compensation

图9 补偿后理论与实验对比
Fig.9 Comparison of theoretical and experimental transmittance spectra after compensation

[1] DEOPURA M, ULLAL C K, TEMELKURAN B, et al. Dielectric omnidirectional visible reflector[J]. Optics Letters, 2001, 26(15): 1197-1199.
[2] MOULDI A, KANZARI M. Design of an omnidirectional mirror using one dimensional photonic crystal with graded geometric layers thicknesses[J]. Optik, 2012, 123(2): 125-131.
[3] BOUAZZI Y, KANZARI M. Optical Fabry-Perot filter based on photonic band gap quasi-periodic one-dimensional multilayer according to the definite Rudin-Shapiro distribution[J]. Optics Communications, 2012, 285(12): 2774-2779.
[4] TOLMACHEV V A, ASTROVA E V, PILYUGINA J A, et al. 1D photonic crystal fabricated by wet etching of silicon[J]. Optical Materials, 2005, 27(5): 831-835.
[5] TOLMACHEV V A, ASTROVA E V, PEROVA T S, et al. FTIR and Raman investigation of vertically etched silicon as a 1D photonic crystal[C]// Opto-Ireland 2002: Optics and Photonics Technologies and Applications. Galway, Ireland: SPIE, 2003, 353: 196-205.
[6] 温建华, 张杨, 杨毅彪, 等. 基于空气缺陷的光子晶体可调谐滤波器[J]. 光子学报, 2015, 44(8): 154-161.
[7] ZHANG Juan, ZHANG Rongjun, WANG Yang. Enhanced temperature sensing based on sub-threshold nonlinear spectra of one-dimensional photonic crystal with a Kerr defect layer[J]. Journal of Applied Physics, 2014, 116(18): 183104.
[8] CHEN Songtao, ROH K, LEE J, et al. A photonic crystal laser from solution based organo-lead iodide perovskite thin films[J]. ACS Nano, 2016, 10(4): 3959-3967.
[9] 张浩, 王锐, 王旭. 高Q值的全偏振环形光子晶体L3微腔结构设计[J]. 电子科技, 2018, 31(6): 20-23.
[10] 刘文莉, 唐婷婷, 何修军, 等. 红外波段光子晶体线性折射率传感器设计[J]. 光学技术, 2018, 44(2): 183-187.
[11] SAHEL S, AMRI R, BOUAZIZ L, et al. Optical filters using Cantor quasi-periodic one dimensional photonic crystal based on Si/SiO2[J]. Superlattices & Microstructures, 2016, 97: 429- 438.
[12] TIKHONRAVOV A V, TRUBETSKOV M K, AMOTCHKINA T V. Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring[J]. Applied Optics, 2006, 45(27): 7026-7034.
[13] KONSTANTINOV I, BABEVA T, KITOVA S. Analysis of errors in thin-film optical parameters derived from spectrophotometric measurements at normal light incidence[J]. Applied Optics, 1998, 37(19): 4260- 4267.
[14] 陈颖, 范卉青, 王文跃, 等. 多孔硅表面缺陷光子晶体的传感模型及特性[J]. 光学学报, 2015, 35(5): 330-336.
[15] 陈颖, 韩洋洋, 曹会莹, 等. 镜像对称多孔硅光子晶体的折射率传感特性[J]. 中国激光, 2016, 43(4): 206-211.
[16] LAHINI Y, AVIDAN A, POZZI F, et al. Anderson localization and nonlinearity in one-dimensional disordered photonic lattices[J]. Physical Review Letters, 2008, 100(1): 013906.
[17] SULLIVAN B T,DOBROWOLSKI J A. Deposition error compensation for optical multilayer coatings. I. theoretical description[J]. Applied Optics, 1992, 31(19): 3821-3835.
[18] GARCIA P D, JAVADI A, THYRRESTRUP H, et al. Quantifying the intrinsic amount of fabrication disorder in photonic-crystal waveguides from optical far-field intensity measurements[J]. Applied Physics Letters, 2013, 102(3): 031101.
[19] ASPNES D E, THEETEN J B. ChemInform abstract: spectroscopic analysis of the interface between silicon and its thermally grown oxide[J]. Chemischer Informationsdienst, 1980, 11(40): 1359-1365.
[20] GAO Lihong, LEMARCHAND F, LEQUIME M. Refractive index determination of SiO2 layer in the UV/VIS/NIR range: spectrophotometric reverse engineering on single and Bi-layer designs[J]. Journal of the European Optical Society, 2013, 8(1): 13010.

备注

引言

1 结构模型和计算方法

2 结果与讨论

3 膜厚补偿方案

4 结语

期刊信息

备注

引言

1 结构模型和计算方法

2 结果与讨论

3 膜厚补偿方案

4 结 语

期刊信息

4 结语