深圳大学学报理工版

利用二氧化钒薄膜的绝缘-金属相变特性,在硅基片上设计并制备了一种电压控制的超表面调制器件,研究在太赫兹频率范围内超表面器件的透射特性和电控可调谐特性.实验结果表明,当太赫兹波垂直入射可调超表面器件表面时,器件的透射谱线在0.31 THz处达到最高峰值; 而当电压从0 V加至8 V时,器件的透射率明显降低,在0.41 THz处峰值最低; 在0.2～0.6 THz整个波段内,调制深度最大可以达到59%; 而通过对器件施加电压,可以实现在两种不同谐振状态之间的可控,并产生对太赫兹透射率的调制.该实验结果对太赫兹可调超表面的研究发展具有重要意义.

Based on the insulation-metal phase transition characteristics of vanadium dioxide thin films, an metasurface-based electronically controlled terahertz modulation device is designed and fabricated on a high-resistance silicon substrate. The transmission and electronically controlled tunable characteristics of the metasurface in the terahertz frequency range are studied. The experimental results show that when the terahertz wave is perpendicular to the surface of the tunable metasurface device, the transmission line of the device reaches the highest peak at 0.31 THz. And when the voltage increases from 0 V to 8 V, the transmission rate of the device significantly decreases, and the lowest peak value is at 0.41 THz. The modulation depth can be up to 59% in the entire band of 0.2- 0.6 THz. By controlling the applied voltage, the device can switch freely between two resonant states with a large difference in transmittance. The experimental results are of great significance for the research and development of terahertz tunable metasurface.

引言
1 器件设计及制造
2 超表面器件的电场分析
3 结语

图1 电控调制超表面器件结构图<br/>Fig.1 Structure diagram of electronically controlled modulation metasurface device

图1 电控调制超表面器件结构图
Fig.1 Structure diagram of electronically controlled modulation metasurface device

图2 VO2薄膜的性能曲线(实验)<br/>Fig.2 VO2 film performance curve(experiment)

图2 VO2薄膜的性能曲线(实验)
Fig.2 VO2 film performance curve(experiment)

图3 不同电阻值的VO2薄膜对应的仿真图像<br/>Fig.3 Simulation images of VO2 film with different resistance values

图3 不同电阻值的VO2薄膜对应的仿真图像
Fig.3 Simulation images of VO2 film with different resistance values

图4 超表面器件的实验测试图<br/>Fig.4 Experimental test results of metasurface-based devices

图4 超表面器件的实验测试图
Fig.4 Experimental test results of metasurface-based devices

图5 仿真电场分布<br/>Fig.5 Simulated electric field distribution

图5 仿真电场分布
Fig.5 Simulated electric field distribution

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备注

引言

1 器件设计及制造

2 超表面器件的电场分析

3 结语

期刊信息

备注

引言

1 器件设计及制造

2 超表面器件的电场分析

3 结 语

期刊信息

3 结语