雷耀虎,黄建衡,刘 鑫,等.X射线微分相衬成像系统莫尔条纹对比度的改善(英文)[J].深圳大学学报理工版,2016,(05):506-510.[doi:10.3724/SP.J.1249.2016.05506 ]
Lei Yaohu,Huang Jianheng,Liu Xin,et al.Improvement of visibility of moir fringe in X-ray differential phase-contrast imaging[J].Journal of Shenzhen University Science and Engineering,2016,(05):506-510.[doi:10.3724/SP.J.1249.2016.05506 ]
X射线微分相衬成像系统莫尔条纹对比度的改善(英文)

深圳大学光电工程学院,光电子器件与系统教育部/广东省重点实验室,广东深圳 518060

光学工程; X射线; 相衬; 吸收光栅; 微铸造; 莫尔条纹;

Improvement of visibility of moir fringe in X-ray differential phase-contrast imaging
Lei Yaohu, Huang Jianheng, Liu Xin, Li Ji, Guo Jinchuan, and Niu Hanben

Lei Yaohu, Huang Jianheng, Liu Xin, Li Ji, Guo Jinchuan, and Niu HanbenCollege of Optoelectronic Engineering, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, Guangdong Province, P.R.China

optical engineering; X-ray; phase contrast; absorption grating; micro-casting; moiré; fringe; bismuth

DOI: 10.3724/SP.J.1249.2016.05506

备注

为制作高质量的铋吸收光栅以提高X射线微分相衬成像系统性能,针对表面改性环节对微铸造技术进行改进,以Bi2O3取代SiO2作为改进的浸润层.在周期为3 μm、深度为150 μm的分析光栅结构上制作了具有高填充率的分析光栅,获得了该光栅的扫描电子显微镜照片.为进一步表明改进微铸造技术制作分析光栅的优越性,与改进前的分析光栅进行对比.将两种光栅先后置于X射线微分干涉相衬成像系统中,分别获取了系统莫尔条纹.从最终的条纹对比度上判断,改进后的微铸造技术制作的分析光栅填充率明显提高.

To fabricate high performance Bi absorption gratings for use in X-ray differential phase-contrast imaging(DPCI), the micro-casting method was improved via surface modification. Bi2O3 was used in place of SiO2 as an improved wetting layer. A scanning electron microscopy showed that a high filling-ratio analyzer grating with a period of 3 μm and a depth of 150 μm was obtained. Furthermore, the superiority of the presented analyzer grating to the one fabricated using the traditional micro-casting method was revealed through a comparison of moiré patterns. These tests demonstrate an enhancement to the micro-casting method for the fabrication of absorption gratings.

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