超声对X射线分析光栅铋填充率影响研究

深圳大学光电工程学院,光电子器件与系统教育部/广东省重点实验室,广东深圳 518060

光学工程; X射线; 相衬; 分析光栅; 微铸造; 表面改性; 浸润;; 超声

Influence of ultrasonic on filling ratio of Bi in X-ray analyzer gratings
Lei Yaohu, Liu Xin, Guo Jinchuan, Li Ji, and Niu Hanben

College of Optoelectronic Engineering, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, Guangdong Province, P.R.China

optical engineering; X-ray; phase contrast; analyzer grating; micro-casting; surface modification; wettability; bismuth; ultrasonic

DOI: 10.3724/SP.J.1249.2016.02138

备注

改进的微铸造技术利用Bi2O3代替SiO2作为浸润层,以提升X射线吸收光栅中铋的填充率.通过源光栅发现,铋填充率很大程度上取决于初始浸润材料Bi(NO3)3的覆盖程度.提出使用超声的方法,使丙酮携带Bi(NO3)3进入高深宽比分析光栅结构内部,并覆盖在侧壁表面,待Bi(NO3)3高温分解为Bi2O3后,利用Bi2O3与铋的浸润性使铋完全进入分析光栅结构内部.实验结果表明,相比不使用和使用频率如40、120及170 kHz的超声,80 kHz的超声更有助于提高铋的填充率,同时还表明超声具备向高深宽比结构内辅助填充物质的能力.

Bi2O3 is applied as the wettability layer to replace SiO2 in an improved micro-casting technology to increase the filling ratio of Bi in X-ray absorption gratings. The findings in the source grating demonstrate that the Bi filling ratio depends largely on the coverage of wettability material Bi(NO3)3. We present the ultrasound assisted filling method to make the solution of acetone carrying Bi(NO3)3 flow freely into the high aspect-ratio structure of the analyzer grating so that the surface of the side walls is covered by Bi(NO3)3 after the acetone volatilizes. Thus the perfect wettability between Bi2O3 decomposed by Bi(NO3)3 at high temperature and the molten Bi leads to Bi in a full filling in the analyzer grating structure. Experimental results show that the ultrasonic with frequency of 80 kHz induces a higher Bi filling ratio compared with those with the frequencies of 40, 120 and 170 kHz. The results also demonstrate that the ultrasonic can be used as an assisted mean to fill materials in high aspect-ratio structures.

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