[1]邓元龙,赵小丽,李学金,等.基于F-P干涉的强度型光纤压力传感器[J].深圳大学学报理工版,2011,28(No.1(001-095)):17-22.
　DENG Yuan-long,ZHAO Xiao-li,LI Xue-jin,et al.An optical fiber pressure sensor based on F-P interferometry and intensity demodulation[J].Journal of Shenzhen University Science and Engineering,2011,28(No.1(001-095)):17-22.
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基于F-P干涉的强度型光纤压力传感器()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第28卷
期数:
2011年No.1(001-095)
页码:
17-22
栏目:
光电工程
出版日期:
2011-01-10

文章信息/Info

Title:
An optical fiber pressure sensor based on F-P interferometry and intensity demodulation
文章编号:
1000-2618(2011)01-0017-06
作者:
邓元龙1; 赵小丽1; 李学金1; 耿优福1; 洪学明1; 邱成军2
1) 深圳大学 深圳市传感器技术重点实验室，深圳 518060
2) 黑龙江大学电子工程学院，哈尔滨 150080
Author(s):
DENG Yuan-long1; ZHAO Xiao-li1; LI Xue-jin1; GENG You-fu1; HONG Xue-ming1; and QIU Cheng-jun2
1)Shenzhen University,Shenzhen Key Laboratory of Sensor Technology,Shenzhen 518060,P.R.China
2)College of Electronic Engineering,Heilongjiang University,Harbin 150080,P.R.China
关键词:
传感器技术; 光纤光学; 压力测量; 微机电系统; Fabry-Perot干涉; 方形硅膜; 强度调制
Keywords:
sensor technology; fiber optics; pressure measurement; micro-electro-mechanical systems (MEMS); Fabry-Perot(F-P) interferometers; square silicon diaphragm; amplitude modulation
分类号:
TP 212.1；TH 823
文献标志码:
A
摘要:
研究基于强度解调技术的Fabry-Perot干涉型光纤微机电系统(micro-electro-mechanical systems，MEMS) 压力传感器．该传感器采用MEMS各向异性腐蚀工艺加工的方形硅杯，其硅杯结构尺寸和表面光洁度比圆形压力敏感膜一致性好．传感器采用大面积比的方法，降低硅敏感膜片弯曲变形所引起的非线性测量误差，新增参考光路以补偿光源功率波动对测量的影响．在0～38 kPa压力范围内实现了单值测量，相对灵敏度达到0.7%/kPa．实验与理论分析结果一致，具有很好的测量重复性．提出的多波长和多传感融合的测量方法，可用于扩大测量范围，提高灵敏度．
Abstract:
An optical fiber pressure sensor was designed，fabricated and characterized．It employed a Fabry-Perot (F-P) interferometer and simple intensity-demodulation technology．A square silicon cup processed by anisotropic etching serves as sensitive element for the better consistency than that of circular diaphragm．A large area ratio of the moving mirror to the stationary one is introduced to reduce the nonlinearity due to the non-planarity of the deflection．Reference light generated from a 2×2 optical fiber coupler is used to decrease the influence of intensity variations of the light source．Single-value measurement was achieved under the pressure range from 0 to 38 kPa．The experimental results demonstrate an upmost relative sensitivity of 0.7%/kPa and a reasonable repeatability，consisting well with the theoretical analysis and simulation．A new method of multi-wave or multi-sensor is presented to expand the measurement range with high sensitivity．

参考文献/References:


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［1］GE Yi-xian，WANG Ming，YAN Hai-tao．Optical MEMS pressure sensor based on a mesa-diaphragm structure［J］．Optics Express，2008，16(26)：21746-21752.
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备注/Memo

备注/Memo:
收稿日期：2010-09-09；修回日期：2010-11-02
基金项目：国家自然科学基金资助项目（60978041）；深圳市基础研究资助项目（JC200903130271A）
作者简介：邓元龙（1971-），男（汉族），安徽省滁州市人，深圳大学教授．E-mail：dengyl@szu.edu.cn
通讯作者：李学金（1966-），男（汉族），深圳大学教授、博士生导师. E-mail：lixuejin@szu.edu.cn
更新日期/Last Update: 2011-01-12