[1]李正操,余晓毅,苗伟,等.氧化钇掺杂铁薄膜的制备及热稳定行为[J].深圳大学学报理工版,2010,27(3):273-276.
 LI Zheng-cao,YU Xiao-yi,MIAO Wei,et al.The preparation and behavior in annealing of the yttria dispersed Ferrum films[J].Journal of Shenzhen University Science and Engineering,2010,27(3):273-276.
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氧化钇掺杂铁薄膜的制备及热稳定行为()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第27卷
期数:
2010年3期
页码:
273-276
栏目:
化学与化工
出版日期:
2010-07-30

文章信息/Info

Title:
The preparation and behavior in annealing of the yttria dispersed Ferrum films
文章编号:
1000-2618(2010)03-0273-04
作者:
李正操余晓毅苗伟马天张政军
清华大学材料科学与工程系,新型陶瓷与精细工艺国家重点实验室,北京100084
Author(s):
LI Zheng-caoYU Xiao-yiMIAO WeiMA Tianand ZHANG Zheng-jun
State Key Laboratory of New Ceramic and Fine Processing
Department of Material Science and Engineering
Tsinghua University
Beijing 10084
P.R.China
关键词:
纳米材料弥散强化薄膜铁薄膜氧化钇真空退火纳米硬度
Keywords:
nanomaterialdispersion strengthened filmferrum film yttriavacuum annealingnano hardness
分类号:
TG 1
文献标志码:
A
摘要:
为研究氧化钇掺杂强化在薄膜中的应用,通过双靶磁控共溅射方法,制备了氧化钇弥散铁薄膜,利用X射线衍射仪、X射线荧光光谱仪、扫描电子显微镜和纳米压痕仪表征其结构、成分、形貌和纳米硬度.采用真空封管退火技术对薄膜进行热退火处理.实验结果表明,成功制备的铁基薄膜钇、氧元素弥散程度较好,在500 ℃真空退火处理后,铁薄膜的纳米硬度显著提高;随着氧化钇掺杂量的增多,纳米硬度增长率提高.该真空热处理方法为改善氧化物弥散强化合金的力学性能提供了借鉴.
Abstract:
In order to investigate the yttria dispersed strength effect in thin films,double-target magnetron sputtering was carried out to prepare the yttria dispersed ferrum films.Crystal structure,composition,thickness and nano hardness were examined by X-ray diffraction,X-ray fluorescence,scanning electron microscope and nanoindenter.The films were annealed at enhancing temperature in a quartz tube after being vacuumed.Experimental results indicate that the nano hardness of ferrum films was enhanced significantly after 500 ℃ vacuum annealing,and the enhancing rate increased with the doping rate of yttria. This may provide reference for improving the mechanical property of ODS alloy.

参考文献/References:


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备注/Memo

备注/Memo:
收稿日期:2010-05-24;修回日期:2010-06-10
基金项目:国家自然科学基金资助项目(50701026);国家重点基础研究发展计划资助项目(2010CB731600)
作者简介:李正操(1975-),男(满族),辽宁省铁岭市人,清华大学副教授、博士.E-mail:zcli@tsinghua.edu.cn
更新日期/Last Update: 2010-07-30