ZHAO Xiaodan,WANG Tonglin,ZHANG Mingda,et al.Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation[J].Journal of Shenzhen University Science and Engineering,2020,37(1):44-50.[doi:10.3724/SP.J.1249.2020.01044]





Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation
1) 太原理工大学物理与光电工程学院,山西太原 030024
2) 太原理工大学新型传感器与智能控制教育部重点实验室,山西太原 030024
ZHAO Xiaodan1 WANG Tonglin1 ZHANG Mingda1 and YANG Yibiao12
1) Department of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, Shanxi Province, P.R.China
2) Key Laboratory of Advanced Transducers and Intelligent Control System of Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, Shanxi Province, P.R.China
optics one-dimensional photonic crystal transfer matrix method film thickness perturbation transmission spectrum magnetron sputtering random error
In order to study the effect of film thickness perturbation on the performance of nanophotonic devices, this paper designs a periodic disordered photonic crystal model by introducing disordered perturbations obeying Gaussian distribution. By analyzing the influence of the cycles number and the thickness of two materials on the optical properties, an optimization scheme for compensating the film thickness disturbance is proposed. The thickness error of one material in the same period is compensated by the thickness of the other material. This compensation provides a stable forbidden center position and a forbidden band width. Both theory and experiments have verified that this compensation scheme can reduce the accumulation of thickness deviation. Our method reduces both the requirements for preparation accuracy and the deviation of experimental and theoretical values.


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Foundation:National Natural Science Foundation of China (61575138, 11704275); Applied Basic Research Program of Shanxi Province (201901D211070); Key Research and Development Project of Shanxi Province (201903D421052)
Corresponding author:Professor YANG Yibiao. E-mail: yangyibiao_tyut@sohu.com
Citation:ZHAO Xiaodan, WANG Tonglin, ZHANG Mingda, et al. Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation[J]. Journal of Shenzhen University Science and Engineering, 2020, 37(1): 44-50.(in Chinese)
作者简介:赵晓丹(1991—),太原理工大学讲师、博士. 研究方向:微纳光电子器件. E-mail:zxd_eve@163.com
引文:赵晓丹,王同林,张明达,等. 一维光子晶体无序膜厚扰动的分析及优化[J]. 深圳大学学报理工版,2020,37(1):44-50.
更新日期/Last Update: 2020-01-30