[1]赵晓丹,王同林,张明达,等.一维光子晶体无序膜厚扰动的分析及优化[J].深圳大学学报理工版,2020,37(1):44-50.[doi:10.3724/SP.J.1249.2020.01044]
 ZHAO Xiaodan,WANG Tonglin,ZHANG Mingda,et al.Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation[J].Journal of Shenzhen University Science and Engineering,2020,37(1):44-50.[doi:10.3724/SP.J.1249.2020.01044]
点击复制

一维光子晶体无序膜厚扰动的分析及优化()
分享到:

《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第37卷
期数:
2020年第1期
页码:
44-50
栏目:
光电工程
出版日期:
2020-01-08

文章信息/Info

Title:
Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation
文章编号:
202001007
作者:
赵晓丹1王同林1张明达1杨毅彪12
1) 太原理工大学物理与光电工程学院,山西太原 030024
2) 太原理工大学新型传感器与智能控制教育部重点实验室,山西太原 030024
Author(s):
ZHAO Xiaodan1 WANG Tonglin1 ZHANG Mingda1 and YANG Yibiao12
1) Department of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, Shanxi Province, P.R.China
2) Key Laboratory of Advanced Transducers and Intelligent Control System of Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, Shanxi Province, P.R.China
关键词:
光学一维光子晶体传输矩阵法膜厚微扰透射谱磁控溅射随机误差
Keywords:
optics one-dimensional photonic crystal transfer matrix method film thickness perturbation transmission spectrum magnetron sputtering random error
分类号:
O434.13
DOI:
10.3724/SP.J.1249.2020.01044
文献标志码:
A
摘要:
基于一维周期性光子晶体模型,引入服从高斯分布的无序扰动,形成周期性无序扰动的薄膜模型,研究膜厚微扰对纳米光子器件性能的影响.通过分析周期数和两种材料厚度对光学特性的影响,提出在周期性光子晶体中,同一个周期内一种材料的厚度误差可用另一种材料的厚度来弥补,从而得到稳定的禁带中心位置和禁带宽度.理论和实验结果均验证了此补偿方案可以削减相关厚度偏差的累积,同时降低制备精度要求,减小实验值和理论值的偏差.
Abstract:
In order to study the effect of film thickness perturbation on the performance of nanophotonic devices, this paper designs a periodic disordered photonic crystal model by introducing disordered perturbations obeying Gaussian distribution. By analyzing the influence of the cycles number and the thickness of two materials on the optical properties, an optimization scheme for compensating the film thickness disturbance is proposed. The thickness error of one material in the same period is compensated by the thickness of the other material. This compensation provides a stable forbidden center position and a forbidden band width. Both theory and experiments have verified that this compensation scheme can reduce the accumulation of thickness deviation. Our method reduces both the requirements for preparation accuracy and the deviation of experimental and theoretical values.

参考文献/References:

[1] DEOPURA M, ULLAL C K, TEMELKURAN B, et al. Dielectric omnidirectional visible reflector[J]. Optics Letters, 2001, 26(15): 1197-1199.
[2] MOULDI A, KANZARI M. Design of an omnidirectional mirror using one dimensional photonic crystal with graded geometric layers thicknesses[J]. Optik, 2012, 123(2): 125-131.
[3] BOUAZZI Y, KANZARI M. Optical Fabry-Perot filter based on photonic band gap quasi-periodic one-dimensional multilayer according to the definite Rudin-Shapiro distribution[J]. Optics Communications, 2012, 285(12): 2774-2779.
[4] TOLMACHEV V A, ASTROVA E V, PILYUGINA J A, et al. 1D photonic crystal fabricated by wet etching of silicon[J]. Optical Materials, 2005, 27(5): 831-835.
[5] TOLMACHEV V A, ASTROVA E V, PEROVA T S, et al. FTIR and Raman investigation of vertically etched silicon as a 1D photonic crystal[C]// Opto-Ireland 2002: Optics and Photonics Technologies and Applications. Galway, Ireland: SPIE, 2003, 353: 196-205.
[6] 温建华, 张杨, 杨毅彪, 等. 基于空气缺陷的光子晶体可调谐滤波器[J]. 光子学报, 2015, 44(8): 154-161.
WEN Jianhua, ZHANG Yang, YANG Yibiao, et al. Photonic crystal tunable optical filter based on air defect layer[J]. Acta Photonica Sinica, 2015, 44(8): 154-161.(in Chinese)
[7] ZHANG Juan, ZHANG Rongjun, WANG Yang. Enhanced temperature sensing based on sub-threshold nonlinear spectra of one-dimensional photonic crystal with a Kerr defect layer[J]. Journal of Applied Physics, 2014, 116(18): 183104.
[8] CHEN Songtao, ROH K, LEE J, et al. A photonic crystal laser from solution based organo-lead iodide perovskite thin films[J]. ACS Nano, 2016, 10(4): 3959-3967.
[9] 张浩, 王锐, 王旭. 高Q值的全偏振环形光子晶体L3微腔结构设计[J]. 电子科技, 2018, 31(6): 20-23.
ZHANG Hao, WANG Rui, WANG Xu. High-Q factor polarization-independent annular photonic crystal L3 micro-cavity[J]. Electronic Science and Technology, 2018, 31(6): 20-23.(in Chinses)
[10] 刘文莉, 唐婷婷, 何修军, 等. 红外波段光子晶体线性折射率传感器设计[J]. 光学技术, 2018, 44(2): 183-187.
LIU Wenli, TANG Tingting, HE Xiujun, et al. Design of linear refractive index sensor within infrared waveband based on one dimension photonic crystal[J]. Optical Technique, 2018, 44(2): 183-187.(in Chinese)
[11] SAHEL S, AMRI R, BOUAZIZ L, et al. Optical filters using Cantor quasi-periodic one dimensional photonic crystal based on Si/SiO2[J]. Superlattices & Microstructures, 2016, 97: 429-438.
[12] TIKHONRAVOV A V, TRUBETSKOV M K, AMOTCHKINA T V. Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring[J]. Applied Optics, 2006, 45(27): 7026-7034.
[13] KONSTANTINOV I, BABEVA T, KITOVA S. Analysis of errors in thin-film optical parameters derived from spectrophotometric measurements at normal light incidence[J]. Applied Optics, 1998, 37(19): 4260-4267.
[14] 陈颖, 范卉青, 王文跃, 等. 多孔硅表面缺陷光子晶体的传感模型及特性[J]. 光学学报, 2015, 35(5): 330-336.
CHEN Ying, FAN Huiqing, WANG Wenyue, et al. Sensing model and performance of the surface defect photonic crystal with porous silicon[J]. Aata Optica Sinica, 2015, 35(5): 330-336.(in Chinese)
[15] 陈颖, 韩洋洋, 曹会莹, 等. 镜像对称多孔硅光子晶体的折射率传感特性[J]. 中国激光, 2016, 43(4): 206-211.
CHEN Ying, HAN Yangyang, CAO Huiying, et al. Index sensing characteristics for mirror symmetrical porous silicon photonic crystals[J]. Chinese Jounal of Lasers, 2016, 43(4): 206-211.(in Chinese)
[16] LAHINI Y, AVIDAN A, POZZI F, et al. Anderson localization and nonlinearity in one-dimensional disordered photonic lattices[J]. Physical Review Letters, 2008, 100(1): 013906.
[17] SULLIVAN B T,DOBROWOLSKI J A. Deposition error compensation for optical multilayer coatings. I. theoretical description[J]. Applied Optics, 1992, 31(19): 3821-3835.
[18] GARCIA P D, JAVADI A, THYRRESTRUP H, et al. Quantifying the intrinsic amount of fabrication disorder in photonic-crystal waveguides from optical far-field intensity measurements[J]. Applied Physics Letters, 2013, 102(3): 031101.
[19] ASPNES D E, THEETEN J B. ChemInform abstract: spectroscopic analysis of the interface between silicon and its thermally grown oxide[J]. Chemischer Informationsdienst, 1980, 11(40): 1359-1365.
[20] GAO Lihong, LEMARCHAND F, LEQUIME M. Refractive index determination of SiO2 layer in the UV/VIS/NIR range: spectrophotometric reverse engineering on single and Bi-layer designs[J]. Journal of the European Optical Society, 2013, 8(1): 13010.
[21] TIKHONRAVOV A V, TRUBETSKOV M K. Elimination of cumulative effect of thickness errors in monochromatic monitoring of optical coating production: theory[J]. Applied Optics, 2007, 46(11): 2084-2090.

相似文献/References:

[1]阮双琛,权润爱,张敏,等.反射式连续波太赫兹成像系统[J].深圳大学学报理工版,2010,27(1):6.
 RUAN Shuang-chen,QUAN Run-ai,ZHANG Min,et al.CW THz imaging constructions in reflection geometry[J].Journal of Shenzhen University Science and Engineering,2010,27(1):6.
[2]李学金,宋奎岩,洪学明,等.双空芯光子晶体光纤温度传感特性研究[J].深圳大学学报理工版,2010,27(1):28.
 LI Xue-jin,SONG Kui-yan,HONG Xue-ming,et al.Research on temperature characteristics of hollow dual-core liquid-filled photonic crystal fiber[J].Journal of Shenzhen University Science and Engineering,2010,27(1):28.
[3]杨毅彪,王云才,王拴锋,等.二维介质柱型graphite格子光子晶体禁带特性[J].深圳大学学报理工版,2010,27(2):157.
 YANG Yi-biao,WANG Yun-cai,WANG Shuan-feng,et al.The bandgap characteristics of two dimensional graphite lattice photonic crystals with dielectric rods[J].Journal of Shenzhen University Science and Engineering,2010,27(1):157.
[4]梁华伟,阮双琛,张敏,等.锥形纳米金属线太赫兹波聚焦特性研究[J].深圳大学学报理工版,2012,29(No.4(283-376)):300.[doi:10.3724/SP.J.1249.2012.04300]
 LIANG Hua-wei,RUAN Shuang-chen,ZHANG Min,et al.Study on the focusing characteristics of conical metal nanowires[J].Journal of Shenzhen University Science and Engineering,2012,29(1):300.[doi:10.3724/SP.J.1249.2012.04300]
[5]刘俊星,索鹏,傅吉波,等.基于VO2相变实现太赫兹波段宽带抗反射[J].深圳大学学报理工版,2019,36(2):189.[doi:10.3724/SP.J.1249.2019.02189]
 LIU Junxing,SUO Peng,et al.Broad band antireflection in terahertz band based on vanadium dioxide phase transition[J].Journal of Shenzhen University Science and Engineering,2019,36(1):189.[doi:10.3724/SP.J.1249.2019.02189]
[6]闵长俊,袁运琪,张聿全,等.操纵微纳颗粒的“光之手”——光镊技术研究进展[J].深圳大学学报理工版,2020,37(5):441.[doi:10.3724/SP.J.1249.2020.05441]
 MIN Changjun,YUAN Yunqi,ZHANG Yuquan,et al.The hand of light for micro/nano-particle manipulation: research progress of optical tweezers[J].Journal of Shenzhen University Science and Engineering,2020,37(1):441.[doi:10.3724/SP.J.1249.2020.05441]

备注/Memo

备注/Memo:
Received:2018-11-12;Accepted:2019-01-03
Foundation:National Natural Science Foundation of China (61575138, 11704275); Applied Basic Research Program of Shanxi Province (201901D211070); Key Research and Development Project of Shanxi Province (201903D421052)
Corresponding author:Professor YANG Yibiao. E-mail: yangyibiao_tyut@sohu.com
Citation:ZHAO Xiaodan, WANG Tonglin, ZHANG Mingda, et al. Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation[J]. Journal of Shenzhen University Science and Engineering, 2020, 37(1): 44-50.(in Chinese)
基金项目:国家自然科学基金资助项目(61575138,11704275);山西省应用基础研究计划资助项目(201901D211070);山西省重点研发计划资助项目(201903D421052)
作者简介:赵晓丹(1991—),太原理工大学讲师、博士. 研究方向:微纳光电子器件. E-mail:zxd_eve@163.com
引文:赵晓丹,王同林,张明达,等. 一维光子晶体无序膜厚扰动的分析及优化[J]. 深圳大学学报理工版,2020,37(1):44-50.
更新日期/Last Update: 2020-01-30