[1]姜建伟,刘凯歌,彭小波,等.坩埚高径比对泡生大尺寸蓝宝石单晶的影响[J].深圳大学学报理工版,2016,33(6):599-605.[doi:10.3724/SP.J.1249.2016.06599]
　Jiang Jianwei,Liu Kaige,Peng Xiaobo,et al.Effects of crucible H/D ratio on large size Kyropoulos sapphire single crystal[J].Journal of Shenzhen University Science and Engineering,2016,33(6):599-605.[doi:10.3724/SP.J.1249.2016.06599]
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坩埚高径比对泡生大尺寸蓝宝石单晶的影响()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第33卷
期数:
2016年第6期
页码:
599-605
栏目:
光电工程
出版日期:
2016-11-20

文章信息/Info

Title:
Effects of crucible H/D ratio on large size Kyropoulos sapphire single crystal
文章编号:
201606008
作者:
姜建伟1; 刘凯歌2; 彭小波2; 李玲3; 翟剑庞3
1) 深圳大学电子科学与技术学院，广东深圳 518060
2) 深圳大学机电与控制工程学院，广东深圳 518060
3) 深圳大学光电工程学院，广东深圳 518060
Author(s):
Jiang Jianwei1;  Liu Kaige2;  Peng Xiaobo2;  Li Ling3;  and Zhai Jianpang3
1) College of Electronic Science and Technology, Shenzhen University, Shenzhen 518060, Guangdong Province, P.R.China
2) College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, Guangdong Province, P.R.China
3) College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, Guangdong Province, P.R.China
关键词:
晶体学; 蓝宝石晶体; 泡生法; 温场模拟; 发光二极管衬底材料; 晶体缺陷
Keywords:
crystallography;  sapphire crystal;  Kyropoulos method;  numerical simulation;  light emitting diode substrate;  crystal defect
分类号:
O 78
DOI:
10.3724/SP.J.1249.2016.06599
文献标志码:
A
摘要:
研究了高径比分别为1.36和1.50的两组坩埚在炉体内的轴向、径向温度梯度和液流情况. 在两组坩埚中进行晶体生长实验，将生长出来的晶体进行掏棒和切片，并对晶棒进行应力和气泡检测，对晶片进行位错和双晶摇摆曲线检测. 对比理论计算和实验结果表明，当纵横温度变化近似一次函数，且纵横温度梯度作用下的固液面的夹角在45°～60°时，可以有效降低应力，减少开裂几率；当熔体内部只有一个涡旋的时候，可有效减少晶体气泡；坩埚高径比为1.36时，能有效降低位错密度，提高结晶性.
Abstract:
We investigate the effects of the crucible height to diameter ratio H/D on the quality of large size sapphire single crystal theoretically and experimentally. For two crucibles with H/D ratios of 1.36 and 1.50 we calculate the axial and radial temperature gradients and flow theoretically. We analyze the effects of two temperature fields on the growth of sapphire crystal in these two temperature fields. By comparing the theoretical calculation results with experimental results of these two temperature fields, the following conclusions are obtained: the stress and cracking probability are effectively reduced when the axial and radial temperature curves are close to linear function and the angle of solid surface is between 45° and 60° in the role of the axial and radial temperature gradient; the bubble inside the sapphire crystal is reduced when the melt has only one vortex; the dislocation density is reduced, and the crystallization quality is increased when the crucible H/D ratio is 1.36.

参考文献/References:

［1］ Akselrod M S, Bruni F J. Modern trends in crystal growth and new applications of sapphire［J］. Journal of Crystal Growth, 2012, 360(1): 134-145.
［2］ Scheel H J. Historical aspects of crystal growth technology［J］. Journal of Crystal Growth, 2000, 211(1): 1-12.

［3］ Nassau K. Verneuil: the man and the method［J］. Journal of Crystal Growth, 1972, s13/s14(3):12-18.
［4］ Akasaki I. Key inventions in the history of nitride-based blue LED and LD［J］. Journal of Crystal Growth, 2007,300(1):2-10.
［5］ Komaki H, Nakamura T, Katayama R, et al. Growth of In-rich InGaN films on sapphire via GaN layer by RF-MBE［J］. Journal of Crystal Growth, 2007, s301/s302(4):473-477.
［6］ Foxon C T, Campion R P, Grant V A, et al. Use of band-gap thermometry to investigate the growth of GaN on sapphire and GaAs［J］. Journal of Crystal Growth, 2007,301(4):482-485.
［7］ 王东阳, 贺威, 李玲, 等. 光学质量大尺寸蓝宝石单晶工艺研究［J］. 深圳大学学报理工版, 2015, 32(4): 350-356.
Wang Dongyang, He Wei, Li Ling, et al. Growth technique of optical quality large-size single-crystal sapphire［J］. Journal of Shenzhen University Science and Engineering, 2015, 32(4): 350-356.(in Chinese)
［8］ 杨琳, 左然. 泡生法蓝宝石不同生长阶段热应力的数值模拟研究［J］. 材料导报, 2012, 26(22): 134-137.
Yang Lin, Zuo Ran. Study on numerical simulation of thermal stress at different stages in Kyropoulos sapphire crystal growth［J］. Materials Review, 2012, 26(22): 134-137.(in Chinese)
［9］ Yamada M, Tao C. Microscopic observation of strain induced in heteroepitaxial layers with reflection type of infrared polariscope［J］. Journal of Crystal Growth, 2000,210(1):102-106.
［10］ Khattak C P, Schmid F. Growth of the world’s largest sapphire crystals［J］. Journal of Crystal Growth, 2001,225(2/3/4):572-579.
［11］ Labelle H E. EFG, the invention and application to sapphire growth［J］. Journal of Crystal Growth, 1980,50(1):8-17.
［12］ Budenkova O N, Vasiliev M G, Yuferev V S, et al. Simulation of global heat transfer in the Czochralski process for BGO sillenite crystals［J］. Journal of Crystal Growth, 2004,266(1/2/3):103-108.
［13］ Bunoiu O M, Nicoara I, Santailler J L, et al. On the void distribution and size in shaped sapphire crystals［J］. Crystal Research & Technology, 2005,40(9):852-859.
［14］ 曾贵平, 殷绍唐, 秦青海, 等. 钛宝石晶体中的位错以及退火对位错的影响［J］. 硅酸盐学报, 2001,29(2): 168-171.
Zeng Guiping, Yin Shaotang, Qin Qinghai, et al. Dislocation lines in doped-Ti sapphire crystal and the effect of annealing［J］. Journal of the Chinese Ceramic Society, 2001,29(2): 168-171.(in Chinese)
［15］ 徐军, 周国清, 邓佩珍, 等. 温梯法蓝宝石(Al2O3)晶体的脱碳去色退火研究［J］. 无机材料学报, 2005, 20(5): 1095-1098.
Xu Jun,Zhou Guoqing,Deng Peizhen,et al.Decarbonization and decolorization of sapphire crystals growth by the temperature gradient technique［J］. Journal of Inorganic Materials, 2005, 20(5): 1095-1098.(in Chinese)
［16］ 姚泰, 韩杰才, 左洪波, 等. 蓝宝石单晶的气孔形成研究［J］. 无机材料学报, 2008, 23(3): 439-442.
Yao Tai, Han Jiecai, Zuo Hongbo, et al. Bubble formation in sapphire single crystal［J］. Journal of Inorganic Materials, 2008, 23(3): 439-442.(in Chinese)
［17］ 姚泰, 左洪波, 韩杰才, 等. 蓝宝石单晶生长过程中应力分布的数值模拟［J］. 哈尔滨理工大学学报, 2006,11(5): 100-104.
Yao Tai, Zuo Hongbo, Han Jiecai, et al. The simulation of the stress distribution in sapphire crystal growth progress［J］. Journal of Harbin University of Science and Technology, 2006,11(5): 100-104.(in Chinese)
［18］ 韩杰才, 孟松鹤, 左洪波, 等. 大尺寸蓝宝石单晶的冷心放肩微量提拉制备法: 中国，CN1724722［P］. 2006-01-25.
Han Jiecai, Meng Songhe, Zuo Hongbo, et al. SAPMAC method of large-size sapphire single crystal: China，CN1724722［P］. 2006-01-25.(in Chinese)
［19］ 汪传勇, 左然, Andrey S,等. 泡生法生长蓝宝石单晶的热场改进与模拟优化［J］. 人工晶体学报, 2011,40(1): 83-87.
Wang Chuanyong, Zuo Ran, Andrey S, et al. Improvement and optimization simulation of the thermal fields in sapphire crystal grown by kyropoulos method［J］. Journal of Synthetic Crystals, 2011,40 (1): 83-87. (in Chinese)
［20］ 李金权, 苏小平. 气流湍流对泡生法生长蓝宝石单晶温场的影响［J］. 人工晶体学报, 2008,37(1): 236-247.
Li Jinquan, Su Xiaoping. Influence of gas turbulence on thermal field during growth of sapphire crystal using kyropoulos method［J］. Journal of Synthetic Crystals, 2008, 37(1): 236-247.(in Chinese)
［21］ 韩江山, 左然. 钼屏发射率对泡生法蓝宝石单晶生长影响的数值模拟研究［J］. 材料导报, 2013, 27(16): 143-150.
Han Jiangshan, Zuo Ran. Numerical simulation research on influence of emissivity of molybdenum shield on sapphire growth by kyropoulos method［J］. Materials Review, 2013, 27(16): 143-150.(in Chinese)

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备注/Memo

备注/Memo:
Received：2016-07-01；Accepted：2016-10-08
Foundation：Shenzhen Strategic Emerging Industry Development Special Fund of Knowledge (JCYJ20150525092941038，JCYJ20140418091413577)
Corresponding author：Associate professor Zhai Jianpang. E-mail: jpzhai@szu.edu.cn
Citation：Jiang Jianwei, Liu Kaige, Peng Xiaobo，et al．Effects of crucible H/D ratio on large size Kyropoulos sapphire single crystal［J］. Journal of Shenzhen University Science and Engineering, 2016, 33(6): 599-605.（in Chinese）
基金项目：深圳市战略新兴产业发展专项资金资助项目（JCYJ20150525092941038，JCYJ20140418091413577）
作者简介：姜建伟（1990—），男，深圳大学硕士研究生.研究方向：光学晶体材料.E-mail：momeiJiang@outlook.com
引文：姜建伟，刘凯歌，彭小波，等. 坩埚高径比对泡生大尺寸蓝宝石单晶的影响［J］. 深圳大学学报理工版，2016，33(6)：599-605.
更新日期/Last Update: 2016-10-31