[1]陈凤,郭金川,陈泗方,等.多层薄膜二次电子发射特性的理论研究[J].深圳大学学报理工版,2015,32(4):417-421.[doi:10.3724/SP.J.1249.2015.04417]
 Chen Feng,Guo Jinchuan,Chen Sifang,et al.Theoretical study on secondary electron emission characteristics of multilayer films[J].Journal of Shenzhen University Science and Engineering,2015,32(4):417-421.[doi:10.3724/SP.J.1249.2015.04417]
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多层薄膜二次电子发射特性的理论研究()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第32卷
期数:
2015年第4期
页码:
417-421
栏目:
光电工程
出版日期:
2015-07-16

文章信息/Info

Title:
Theoretical study on secondary electron emission characteristics of multilayer films
文章编号:
201504013
作者:
陈凤郭金川陈泗方周彬
深圳大学光电工程学院,光电子器件与系统教育部重点实验室,深圳 518060
Author(s):
Chen Feng Guo Jinchuan Chen Sifang and Zhou Bin
College of Optoelectronic Engineering, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education, Shenzhen University, Shenzhen 518060, P.R.China
关键词:
薄膜物理学硅基微通道板二次电子发射数值模拟发射系数薄膜厚度
Keywords:
thin-film physics silicon-based microchannel plate secondary electron emission numerical simulation emission coefficient thickness of film
分类号:
TN 101
DOI:
10.3724/SP.J.1249.2015.04417
文献标志码:
A
摘要:
为提高硅基微通道板(silicon-based microchannel plate,Si-MCP)的增益特性,提出采用复合发射层结构取代常规的单发射层结构以改善微通道内壁的二次电子发射特性.计算了SiO2/Si、Al2O3/Si、MgO/Si双层薄膜在不同厚度下的二次电子发射系数与初电子能量的关系曲线,并对结果进行了比对验证.该计算结果对设计制作硅基MCP具有一定参考价值.
Abstract:
In order to improve the gain characteristics of the silicon-based microchannel plate (Si-MCP), we design a complex emission structure comprised of multilayer films to replace the existing monolayer emission structure so as to increase the secondary electron emission of the inner wall. We calculate the secondary electron emission coefficients of SiO2/Si、Al2O3/Si and MgO/Si double-layers under different thicknesses as a function of primary electron energy by using the existing multilayer formulas. The results have a certain reference value to the design and fabrication of Si-MCP.

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备注/Memo

备注/Memo:
Received:2015-03-23;Accepted:2015-04-28
Foundation:National Natural Science Foundation of China (11074172); Major State Basic Research Development of China (2102CB8258804)
Corresponding author:Professor Guo Jinchuan. E-mail: jcguo@szu.edu.cn
Citation:Chen Feng,Guo Jinchuan,Chen Sifang,et al. Theoretical study on secondary electron emission characteristics of multilayer films[J]. Journal of Shenzhen University Science and Engineering, 2015, 32(4): 417-421.(in Chinese)
基金项目:国家自然科学基金资助项目(11074172);国家重点基础研究发展计划资助项目(2102CB825804)
作者简介:陈凤(1989—),女(汉族),江西省宁都县人,深圳大学硕士研究生.E-mail:370420103@qq.com
引文:陈凤,郭金川,陈泗方,等.多层薄膜二次电子发射特性的理论研究[J]. 深圳大学学报理工版,2015,32(4):417-421.
更新日期/Last Update: 2015-06-30