[1]刘丽君,张东平,于永芹,等.真空度对泡生法蓝宝石晶体生长环境的影响[J].深圳大学学报理工版,2013,30(No.4(331-440)):404-408.[doi:10.3724/SP.J.1249.2013.04404]
 Liu Lijun,Zhang Dongping,Yu Yongqin,et al.Effects of vacuum degree on environment of sapphire crystal growth by the Kyropoulos method[J].Journal of Shenzhen University Science and Engineering,2013,30(No.4(331-440)):404-408.[doi:10.3724/SP.J.1249.2013.04404]
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真空度对泡生法蓝宝石晶体生长环境的影响()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第30卷
期数:
2013年No.4(331-440)
页码:
404-408
栏目:
材料科学
出版日期:
2013-07-12

文章信息/Info

Title:
Effects of vacuum degree on environment of sapphire crystal growth by the Kyropoulos method
文章编号:
20130410
作者:
刘丽君1张东平1于永芹1徐家庆2刘世全2
1)深圳大学物理科学与技术学院,深圳 518060
2)深圳晶蓝地光电科技有限公司,深圳 518106
Author(s):
Liu Lijun1 Zhang Dongping1 Yu Yongqin1 Xu Jiaqing2 and Liu Shiquan2
1) College of Physical Science and Technology, Shenzhen University, Shenzhen 518060, P.R.China
2) Shenzhen Kingland Optoelectronic Technology Company Ltd., Shenzhen 518106, P.R.China
关键词:
蓝宝石晶体泡生法真空度钨钼材料氧化晶体生长熔体蒸发LED衬底材料
Keywords:
sapphire crystalKyropoulos method vacuum degree oxidization of tungsten and molybdenum crystal growth molten evaporation deposit LED substrate material
分类号:
TB 79; TB 39
DOI:
10.3724/SP.J.1249.2013.04404
文献标志码:
A
摘要:
指出对泡生法蓝宝石晶体生长,无需采用过高的真空度.炉内真空度达10-1 Pa级时,进一步提高真空度对长晶炉热效率影响不大,较低的真空度有利晶体在出炉前低温段的冷却. 研究表明,尽管高真空度可以有效防止热场中钨/钼材料的氧化,但真空度过高容易导致钨钼材料的升华损耗;真空度越高,原料三氧化二铝熔体蒸发越甚,导致热场零部件污染越严重,从而缩短热场零部件的使用寿命;采用惰性气体保护可以在较低真空度下防止热场中钨钼件氧化,同时抑制熔体蒸发、保持热场洁净并延长热场使用寿命.
Abstract:
It is not necessary to grow sapphire crystals by the Kyropoulos method under ultra-high vacuum. Increasing the vacuum degree to below 10-1 Pa cannot improve obviously the heat efficiency of the Kyropoulos furnace for sapphire growth. A lower vacuum degree is helpful for the cooling of sapphire after power off. A high degree of vacuum efficiently prevents the tungsten heater and the thermal shield, made of tungsten and molybdenum, from oxidization. However, it aggravates the evaporation of molten Al2O3 deposited on thermal parts and deteriorates the environment in the thermal field, shortening the life span of thermal parts. An ultra-high vacuum degree will lead to the sublimation of tungsten and molybdenum in Kyropoulos furnace and therefore shorten the life span of thermal parts. The use of an inert gas fill the furnace in order to achieve a lower vacuum degree can protect furnace elements from oxidization and restrain the evaporation of molten Al2O3 so as to keep the field clean at the same time.

参考文献/References:

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备注/Memo

备注/Memo:
Received:2013-04-07;Accepted:2013-06-15
Foundation:Specialized Research Foundation for the Doctoral Program of Higher Education of China(20124408120004);Special Funds for the Development of Strategic Emerging Industries in Shenzhen (JSGG20121029162326549)
Corresponding author:Professor Zhang Dongping. E-mail zdpsion@szu.edu.cn
Citation:Liu Lijun, Zhang Dongping, Yu Yongqin, et al. Effects of vacuum degree on environment of sapphire crystal growth by the Kyropoulos method[J]. Journal of Shenzhen University Science and Engineering, 2013, 30(4): 404-408.(in Chinese)
基金项目:高等学校博士学科点专项科研基金资助项目(20124408120004);深圳市战略新兴产业发展专项资助项目(JSGG20121029162326549)
作者简介:刘丽君(1962-),女 (汉族),黑龙江省牡丹江市人,深圳大学讲师. E-mail:lljxu@sohu.com
引文:刘丽君,张东平,于永芹,等. 真空度对泡生法蓝宝石晶体生长环境的影响[J]. 深圳大学学报理工版,2013,30(4):404-408.
更新日期/Last Update: 2013-07-12