[1]谷坤明,汤皎宁,李均钦,等.金属-类金刚石薄膜研究进展[J].深圳大学学报理工版,2007,24(2):159-165.
 GU Kun-ming,TANG Jiao-ning,LI Jun-qin,et al.Research progress on metal-DLC films[J].Journal of Shenzhen University Science and Engineering,2007,24(2):159-165.
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金属-类金刚石薄膜研究进展()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第24卷
期数:
2007年2期
页码:
159-165
栏目:
生命科学
出版日期:
2007-04-30

文章信息/Info

Title:
Research progress on metal-DLC films
文章编号:
1000-2618(2007)02-0159-07
作者:
谷坤明汤皎宁李均钦杨钦鹏
深圳大学材料学院,深圳市特种功能材料重点实验室,深圳 518060
Author(s):
GU Kun-mingTANG Jiao-ningLI Jun-qinand YANG Qin-peng
College of Materials Science and Engineering,Shenzhen Key Laboratory of Special Functional Materials,Shenzhen University,Shenzhen 518060,P.R.China
关键词:
DLC膜含金属碳膜Me-DLC薄膜改性薄膜应力缓解
Keywords:
DLC filmsmetal containing carbonMe-DLCmodified filmrelaxing of intrinsic stress of film
分类号:
O 751;TB 332
文献标志码:
A
摘要:
类金刚石膜中的金属粒子可缓解类金刚石薄膜中由于制备态产生大内应力而导致的膜厚受限这一矛盾,能显著改变薄膜各种性能.述评了金属-类金刚石薄膜的制备工艺、不同金属粒子对DLC薄膜形态、键结构、力学及摩擦磨损性能、物理化学性能等的影响,指出在金属粒子对DLC膜的力学及摩擦学性能的影响方面还有很多待确定的因素.
Abstract:
Diamond like carbon(DLC) films suffer their large intrinsic stress resulted from the fabrication process,which limits the thickness of the films and their application.Metal-DLC film is an effective way to reduce the stress and improve the mechanical properties of DLC films.In this paper,the febrication of Metal-doped DLC films with different metal and the influence of the metals on the properties of DLC films,such as micromorphology,bond structure,mechanical,tribological,physical,chemical properties,were reviewed in details.It is pointed out that the influence of metal on the mechanical properties is not quite certain yet.

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备注/Memo

备注/Memo:
收稿日期:2006-07-13;修回日期:2007-01-18
基金项目:广东省自然科学基金资助项目(021286)
作者简介:谷坤明(1973-),男(汉族),湖南省怀化市人,深圳大学讲师、博士.E-mail:kmgu@szu.edu.cn
通讯作者:汤皎宁(1961-),男(汉族),深圳大学教授.E-mail:tjn@szu.edu.cn
更新日期/Last Update: 2007-12-07