[1]奚定平,余陨金,陈静秋.电感耦合RF放电等离子体的电流特性[J].深圳大学学报理工版,2002,19(3):1-7.
 XI Ding-ping,YU Yun-jin,CHEN Jing-qiu.The Characteristic of Current in an Inductive Coupled RF Plasma[J].Journal of Shenzhen University Science and Engineering,2002,19(3):1-7.
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电感耦合RF放电等离子体的电流特性()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第19卷
期数:
2002年3期
页码:
1-7
栏目:
物理
出版日期:
2002-09-30

文章信息/Info

Title:
The Characteristic of Current in an Inductive Coupled RF Plasma
文章编号:
1000-2618(2002)03-0001-07
作者:
奚定平余陨金陈静秋
深圳大学理学院,深圳518060
Author(s):
XI Ding-pingYU Yun-jin CHEN Jing-qiu
College of Science Shenzhen University Shenzhen 518060 P.R.China
关键词:
电感耦合RF放电等离子体电流特性电子速度分布函数玻尔兹曼方程
Keywords:
inductive coupled RF plasmacharacteristic of currentelectron energy distribution functionBoltzman equation
分类号:
O 534
文献标志码:
A
摘要:
从等离子体波动方程和动力学方程出发,利用解析方法,讨论电感耦合RF放电等离子体的电流特性和衰减机制.发现只有当等离子体波的波速低到与等离子体内能量较高一部分电子轴向运动速度相当时,等离子体和波相互作用才能在衰减机制中居主导地位.
Abstract:
From plasma wave equations and plasma kinetic equation,we analytically discussed the characteristic of current in an inductive coupled RF plasma and their damping mechanism.It is found that when phase velocities of the plasma waves slow down to close to the axial thermal velocities of part of higher energy electrons,the interaction between waves and plasma then dominates the damping mechanism.
更新日期/Last Update: 2015-11-13