[1]张小绵,颜坤鹏,赵志超,等.大样本测量中拟合精度与样本量的相关性[J].深圳大学学报理工版,2002,19(2):22-28.
 ZHANG Xiao-mian,YAN Kun-peng,ZHAO Zhi-chao and LI Le-bin.Correlation between Fitting Accuracy and Sample Size in Large Sample Size Measurement[J].Journal of Shenzhen University Science and Engineering,2002,19(2):22-28.
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大样本测量中拟合精度与样本量的相关性()
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《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第19卷
期数:
2002年2期
页码:
22-28
栏目:
光电与信息工程
出版日期:
2002-06-30

文章信息/Info

Title:
Correlation between Fitting Accuracy and Sample Size in Large Sample Size Measurement
文章编号:
1000-2618(2002)02-0022-07
作者:
张小绵1颜坤鹏1赵志超2李乐斌1
1)深圳大学信息工程学院,深圳 518060
2)深圳大学理学院,深圳 518060
Author(s):
ZHANG Xiao-mian1YAN Kun-peng1 ZHAO Zhi-chao2 and LI Le-bin1
1)College of Information Engineering Shenzhen University Shenzhen 518060 P.R. China;
2)College of Science Shenzhen University Shenzhen 518060 P.R. China
关键词:
样本量拟合参数相关系数计算机光学测量误差分析
Keywords:
sample sizefitting parameter correlation coefficientcomputer-aided optical measurementerror analysis
分类号:
O 212.1
文献标志码:
A
摘要:
分析椭偏光谱光度法测量中回归方程的拟合精度与样本量的关系,提出在一定的样本量范围内,测量误差与样本量的一次方成反比的近似定量关系;用拟合曲线的标准差和相关系数来评价拟合精度的局限性;并指出,对测量精度产生重要影响的样本量存在着一个上界,参照由实验确定的这个上界,即可选择一个既能保证较好的测量精度,又可达到降低测试成本的样本量.
Abstract:
This paper investigates the relation between sample size and fitting accuracy of the regression equation in the measurement of ellipsometric spectra. It is found that within certain sample size,the measurement error is approximately inversely proportional to the sample size,and the performance of the fitting accuracy is evaluated by the standard deviation and the correlation coefficient. In addition,an upper bound on 1:he sample size,determined through experiments,can be used to select appropriate sample size which guarantees good measuring accuracy.
更新日期/Last Update: 2015-11-13