[1]马晓翠,舒启清.吸收透明导电薄膜生长与复光学常数测定[J].深圳大学学报理工版,2002,19(2):1-7.
 MA Xiao-cui and SHU Qi-qing.Growth of Absorbing Transparent Conducting Films and Determination of the Complex Optical Constant[J].Journal of Shenzhen University Science and Engineering,2002,19(2):1-7.
点击复制

吸收透明导电薄膜生长与复光学常数测定()
分享到:

《深圳大学学报理工版》[ISSN:1000-2618/CN:44-1401/N]

卷:
第19卷
期数:
2002年2期
页码:
1-7
栏目:
物理
出版日期:
2002-06-30

文章信息/Info

Title:
Growth of Absorbing Transparent Conducting Films and Determination of the Complex Optical Constant
文章编号:
1000-2618(2002)02-0001-07
作者:
马晓翠舒启清
深圳大学理学院,深圳 518060
Author(s):
MA Xiao-cui and SHU Qi-qing
College of Science Shenzhen University Shenzhen 518060 P.R. China
关键词:
吸收透明导电薄膜反射系数透射系数复光学常数
Keywords:
absorbing transparent conducting films reflectancetransmittance complex optical constants
分类号:
O 484.4+1
文献标志码:
A
摘要:
用带特殊热(冷)阱的可控制基片温度的电阻加热式真空蒸镀薄膜装置,把吸收透明导电薄膜Au和In2O3分别通过热蒸镀和活化反应淀积在玻璃基片上. In2O3的电阻为80 Ω/□,光学透射率不小于80%. 透明导电薄膜的复光学常数可通过测量其反射和透射系数得到,但考虑到基片背表面的存在,必须对反射和透射系数进行修正. 引入修正后所得到的复光学常数与椭偏测量的结果一致.
Abstract:
In a resistance-thermal vacuum evaporator with a. special heater(coolant) holder, which can control the sample substrate temperature,Au and In2O3 films were deposited on glass slides by a thermal and an activated reactive evaporation technique, respectively. In2O3 films have a. sheet resistance of 80Ω/口and an optical transmittance of no less than 80%.The complex optical constants of the absorbing transparent conducting Au and In2O3 films can be determined by measuring the reflectance and transmittance if the correction due to the back surface of the glass slide is made. The complex optical constants from the corrected reflectance and transmittance are in agreement with those from ellipsometric measurements.
更新日期/Last Update: 2015-11-13