深圳大学学报理工版

为达到空间滤波的目的 ,元件必须具有对角度高反和高透的特性,因为滤波是通过反射元件边缘的高反和高透快速切换来实现的.多层介质膜的反射带边缘具有高反和高透的特性并且具有角度的敏感性,所以多层介质膜反射元件成为组合滤波器件中最有潜力的元件之一.本研究针对多层介质薄膜反射元件的陡边进行设计,提出利用多层介质薄膜反射元件实现滤波的设想,给出角度分辨率和波长分辨率的目标,比较多层介质膜高级次新型反射薄膜、F-P带通滤光片和长波通新型反射薄膜的陡边设计与研究.考虑到元件的抗损伤能力,对归一化电场强度进行计算,得出了高级次新型反射膜和长波通新型反射膜的最佳设计结果. 该研究为下一步介质膜组合滤波器的设计和制备奠定了基础.

In order to achieve high performance of spatial filtering, the components must have a high reflectivity and transmittance. This is because the spatial filtering is achieved by changing fast between high reflectivity and high transmittance of the edge of the reflective component. The reflective band edge of the multilayer dielectric film has high reflectivity and high transmittance characteristics and angular sensitivity, so the multilayer dielectric film reflective component becomes one of the most promising components in the combined filter device. This paper designs the steep edges of multilayer dielectric film reflective film components. We propose an idea of achieving filtering by using multi-layer dielectric film reflection element, and give the target of angular and wavelength resolution in order to make the film design more effective. For the multi-layer dielectric films, we compare and investigate the designs of steep sides for the advanced new type reflective thin films, F-P band pass filter and long pass reflective films. By considering the anti-damage ability of the components and calculating the normalized electric field strength, we find that the designs for the high level new type reflective film and the long pass new type reflective film are optimal. These research results will lay a good foundation for the design and preparation of the next-stage dielectric film filter, which has important guiding significance.

引言
1 三种薄膜的陡边设计及分析
2 三种不同设计思想的对比分析
3 结语

图1 高级次新型反射膜光谱比较<br/>Fig.1 (Color online)The spectra of high level new reflective thin films

图1 高级次新型反射膜光谱比较
Fig.1 (Color online)The spectra of high level new reflective thin films

图2 高级次新型反射膜1 053 nm高反电场比较<br/>Fig.2 (Color online)The reflectance electric field distribution of high level new reflectance thin films at 1 053 nm

图2 高级次新型反射膜1 053 nm高反电场比较
Fig.2 (Color online)The reflectance electric field distribution of high level new reflectance thin films at 1 053 nm

图3 高级次新型反射膜1 053 nm高透电场比较<br/>Fig.3 (Color online)The transmittance electric field distribution of high level new reflectance thin films at 1 053 nm

图3 高级次新型反射膜1 053 nm高透电场比较
Fig.3 (Color online)The transmittance electric field distribution of high level new reflectance thin films at 1 053 nm

表1 A1、A2和A3的厚度、透反射电场比较<br/>Table 1 The comparison of thickness, the transmittance and reflectance electric fields for A1, A2 and A3

表1 A1、A2和A3的厚度、透反射电场比较
Table 1 The comparison of thickness, the transmittance and reflectance electric fields for A1, A2 and A3

图4 F-P滤光片光谱比较<br/>Fig.4 The spectra of F-P band pass filters

图4 F-P滤光片光谱比较
Fig.4 The spectra of F-P band pass filters

表2 B1、B2和B3的厚度、透射和反射电场比较<br/>Table 2 The comparison of thickness, the transmittance and reflectance electric fields for B1, B2 and B3

表2 B1、B2和B3的厚度、透射和反射电场比较
Table 2 The comparison of thickness, the transmittance and reflectance electric fields for B1, B2 and B3

图5 F-P滤光片1 053 nm高反射电场比较<br/>Fig.5 (Color online)The reflectance electric field distribution of F-P band pass filters at 1 053 nm

图5 F-P滤光片1 053 nm高反射电场比较
Fig.5 (Color online)The reflectance electric field distribution of F-P band pass filters at 1 053 nm

图6 F-P滤光片1 053 nm高透射电场比较<br/>Fig.6 (Color online)The transmittance electric field distribution of F-P band pass filters at 1 053 nm

图6 F-P滤光片1 053 nm高透射电场比较
Fig.6 (Color online)The transmittance electric field distribution of F-P band pass filters at 1 053 nm

图7 长波通新型反射膜光谱比较<br/>Fig.7 (Color online)The spectra of long wave reflection thin films

图7 长波通新型反射膜光谱比较
Fig.7 (Color online)The spectra of long wave reflection thin films

图8 长波通新型反射膜1 053 nm高反电场比较<br/>Fig.8 (Color online)The reflectance electric field distribution of long wave reflection thin films at 1 053 nm

图8 长波通新型反射膜1 053 nm高反电场比较
Fig.8 (Color online)The reflectance electric field distribution of long wave reflection thin films at 1 053 nm

图9 长波通新型反射膜1 053 nm高透射电场比较<br/>Fig.9 (Color online)The transmittance electric field distribution of long wave reflection thin films at 1 053 nm

图9 长波通新型反射膜1 053 nm高透射电场比较
Fig.9 (Color online)The transmittance electric field distribution of long wave reflection thin films at 1 053 nm

表3 C1、 C2及C3的厚度、透射和反射电场比较<br/>Table 3 The comparison of thickness, the transmittance and reflectance electric field for C1, C2 and C3

表3 C1、 C2及C3的厚度、透射和反射电场比较
Table 3 The comparison of thickness, the transmittance and reflectance electric field for C1, C2 and C3

表4 三种不同设计思想的对比<br/>Table 4 The comparisons of three kinds of multi-layer dielectric thin films

表4 三种不同设计思想的对比
Table 4 The comparisons of three kinds of multi-layer dielectric thin films

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备注

引言

1 三种薄膜的陡边设计及分析

2 三种不同设计思想的对比分析

3 结语

期刊信息

备注

引言

1 三种薄膜的陡边设计及分析

2 三种不同设计思想的对比分析

3 结 语

期刊信息

3 结语